Axis 850 Manual do Utilizador Página 4

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© Physik Instrumente (PI) GmbH & Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws. R1 14/08/18.0
Preliminary Data H-850KMLD H-850KMLA Unit Tolerance
Active axes
X, Y, Z, θ
X
, θ
Y
, θ
Z
X, Y, Z, θ
X
, θ
Y
, θ
Z
Motion and positioning
Travel range* X, Y ±50 ±50 mm
Travel range* Z ±25 ±25 mm
Travel range* θ
X
, θ
Y
±15 ±15 °
Travel range* θ
Z
±30 ±30 °
Min. incremental motion X, Y 1 0.5 µm typ.
Min. incremental motion Z 0.5 0.2 µm typ.
Min. incremental motion θ
X
, θ
Y
, θ
Z
5 2.5 µrad typ.
Backlash X, Y 4 2.5 µm typ.
Backlash Z 1 0.7 µm typ.
Backlash θ
X
, θ
Y
15 10 µrad typ.
Backlash θ
Z
30 20 µrad typ.
Repeatability X, Y ±1 ±1 µm typ.
Repeatability Z ±0.3 ±0.3 µm typ.
Repeatability θ
X
, θ
Y
±5 ±5 µrad typ.
Repeatability θ
Z
±9 ±9 µrad typ.
Max. velocity X, Y, Z 0.5 0.5 mm/s
Max. velocity θ
X
, θ
Y
, θ
Z
6 6 mrad/s
Typ. velocity X, Y, Z 0.3 0.3 mm/s
Typ. velocity θ
X
, θ
Y
, θ
Z
3 3 mrad/s
Mechanical properties
Load
(base plate horizontal / any orientation)
50
0 / 200 500 / 200 kg max.
Holding force, de-energized
(base plate horizontal / any orientation)
4000
/ 2000 4000 / 2000 N max.
Motor type DC gear motor DC gear motor
Miscellaneous
Operating temperature range -10 to 50 -10 to 50 °C
Material Aluminum Aluminum
Dimensions Base plate Ø 370
Moving platform Ø 280
Clear aperture Ø 100
Hexapod height in
center position 350
B
a
se plate Ø 370
Moving platform Ø 280
Clear aperture Ø 100
Hexapod height in
center position 350
mm ±1
0 mm
Mass 20 25 kg
Cable length 3 3 m ±10 mm
Technical data specified at 20 ±3 °C.
Ask about custom designs!
* The travel ranges of the individual coordinates (X, Y, Z, θ
X
, θ
Y
, θ
Z
) are interdependent. The data for each axis in this table shows its maximum travel,
where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less.
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