Axis 7100 Guia de Instalação descarregar pdf (Página 175)

ADT Model 7100 Semi-Automatic Dicing System Operations Manual

Workpiece Alignment

P/N 97100-9002-000-14 Ver 06/05

6.1-13

To Perform Teach Alignment:

1 Click to display the Programming Workspace.

2 Expand the Recipe assigned to the Workpiece in the Programming

tree, and select any parameter category of that Recipe. The parameter

table for the Recipe is displayed on the right.

3 In the parameter table, select the tab for the first defined angle.

4 Click Teach Align in the Program area of the lower right pane. The

Wizard tab displays the first step to be performed in the procedure.

5 Click Next.

6 Using the Illumination controls, Magnification settings and the Z/T

Axis controls (see

Chapter 2), define optimal illumination, zoom and

focus settings for the Vision System, so these settings can be used later

on for inspection.

7 Click Next. The Pre-Conditions are now completed.

8 Manually Align the Workpiece (see section 6.1.1.1). Click Finish.

9 Define the Cut Position (see section 6.1.1.2). Click Finish, then click

Next.

Note: A confirmation box is displayed if Alignment has already been taught for

the selected angle. The User can decide whether to override the existing

information or to cancel the procedure.

Figure 6-11: Teach Alignment Opening Wizard

Note: If a cut map for the wafer already exists, the system goes to the defined

cut position. To perform the alignment manually click Back.

Note: For APC algorithm the defined cut position is normally the point where

the blade enters the Workpiece. For GPC algorithm, the defined cut position is

anywhere in a center of a street. The cut map is displayed according to the cut

position referred to the chuck center.

1 2 ... 170 171 172 173 174 175 176 177 178 179 180 ... 423 424

Sem comentários

Axis 7100 Guia de Instalação Página 175