
ADT Model 7100 Semi-Automatic Dicing System Operations Manual
Saw Procedures
P/N 97100-9002-000-14 Ver 06/05
7-1
7 SAW PROCEDURES
This chapter includes the topics related to:
1 Z-Axis Safety, section 7.1
2 Blade Expansion, section 7.2
3 Height Measurements, section 7.3
4 Blade Handling, section 7.4
5 Chuck Change, section 7.5
7.1 Z-Axis Safety
To ensure the Z-Axis safety, the System defines the Z Height Movement,
which is the lowest point that Z-Axis can travel while the X and Y Axes are
in motion. The Z Height Movement is the minimum of three values which
are all parameters in the Setup and Diagnostics workbook. These
parameters are entitled Z-Axis Safety Position, Z-Axis Return Height,
Calibration Start Position, and Pre Non Contact Height.
7.1.1 Z-Axis Safety Position
The Z-Axis Safety Position is an area on the Z-Axis set with reference to
the Workpiece used and its tape thickness. It is automatically calculated by
the following formula: [Chuck position - Substrate thickness - tape
thickness - Safe parameter].This parameter can be viewed in Setup and
Diagnostics > Dicer > Axes > Z > Axis Z Safety Position. If this value
is lower (from the top) than Calibration Safety Position or Pre Non Contact
Height, it is used for the Z Height Movement.
7.1.2 Z-Axis Return Height
The Z-Axis Return Height is the height at which the blade should move
above the workpiece while returning from the end of the finished cut to the
beginning of the next one.
This parameter can be viewed in Setup and Diagnostics > Dicer > Axes
> Z > Z-Axis Return Height. Its value should not be lower (from the top)
than the Z-Axis Safety Position.
7.1.3 Calibration Start Position
Calibration Start Position is the parameter which determines the safety
area above the Chuck that can be used for the Z Height Movement. This
parameter is set by the User.
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